| 摘要 |
The present invention relates to a method for machining a wafer, comprising: (a) providing a wafer having an active surface and a backside surface; (b) attaching a plate substrate to the active surface of the wafer; (c) grinding the backside surface of the wafer; (d) removing the plate substrate; and (e) sawing the wafer. Therefore, warping of the thin wafer can be avoided.
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