发明名称 |
Probe card and method for using probe card, wafer prober utilizing same |
摘要 |
An apparatus for use with a wafer prober and a probe card comprising a stiffening member having a feature defining a first plane. The stiffening member is mountable atop the central portion of the probe card. A reference member is provided to mount to the wafer prober and has an underside with a feature defining a second plane. When the feature of the stiffening member defining the first plane is urged against the feature of the reference member defining a second plane the probe tips of the probe card are substantially planarized relative to the wafer prober.
|
申请公布号 |
US2006279302(A1) |
申请公布日期 |
2006.12.14 |
申请号 |
US20060506653 |
申请日期 |
2006.08.17 |
申请人 |
NEXTEST SYSTEMS CORPORATION |
发明人 |
FOSTER CRAIG Z.;WAKEFIELD RAY |
分类号 |
G01R31/02;H01L |
主分类号 |
G01R31/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|