Micro pump e.g. fluid micro pump, for bidirectional delivery of fluid, has diaphragm areas whose geometric dimensions and elastic properties are designed so that displaced volume and changes of dimensions completely comply with requirements

摘要

The pump has two diaphragms with respective piezoelectric units (12,15). Two diaphragm areas (2,5) are actuated by respective piezoelectric units. The geometric dimensions and elastic properties of both diaphragm areas are designed in such a manner that displaced volume and changes of dimensions occurred during movement of the diaphragm completely comply with the requirements.