发明名称 |
Method for forming a sealed storage non-volative multiple-bit memory cell |
摘要 |
A method of fabricating an array of trapped charge memory cells is described that eliminates bird's beak issues. Implants at a tilt angle form pockets in a substrate that reduce problems resulting from a short channel effect.
|
申请公布号 |
US2006281255(A1) |
申请公布日期 |
2006.12.14 |
申请号 |
US20050153690 |
申请日期 |
2005.06.14 |
申请人 |
CHIU CHUN-JEN;LIU KUANG-WEN;CHEN HSIN-HUEI;HUANG JEN-REN |
发明人 |
CHIU CHUN-JEN;LIU KUANG-WEN;CHEN HSIN-HUEI;HUANG JEN-REN |
分类号 |
H01L21/336 |
主分类号 |
H01L21/336 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|