发明名称 High-temperature evaporator cell and process for evaporating high-melting materials
摘要 An evaporator cell, in particular for evaporating a high-melting material to be evaporated, comprises a crucible for receiving the material to be evaporated, and a heating device with a heating resistor for the resistance heating of the crucible, the heating resistor being provided as an electron emitter for the electron beam heating of the crucible. A process for the evaporation of a high-melting material to be evaporated is also described.
申请公布号 US2006278167(A1) 申请公布日期 2006.12.14
申请号 US20060443748 申请日期 2006.05.31
申请人 FORSCHUNGSVERBUND BERLIN E.V. 发明人 BRAUN WOLFGANG;FISCHER ALBRECHT
分类号 C23C16/00 主分类号 C23C16/00
代理机构 代理人
主权项
地址