摘要 |
An evaporator cell, in particular for evaporating a high-melting material to be evaporated, comprises a crucible for receiving the material to be evaporated, and a heating device with a heating resistor for the resistance heating of the crucible, the heating resistor being provided as an electron emitter for the electron beam heating of the crucible. A process for the evaporation of a high-melting material to be evaporated is also described.
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