Wafer magazine for semiconductor wafers has base body and plate with limiting structures having guide members extending along inside of latter with movement of base plate generating same speed movement of guide members to avoid contact

摘要

The wafer magazine comprises a base body (1) with several limiting structures (10) and a base plate (2) resting on the base body between same. Several of these limiting structures (10) have an inner side (11) facing the base plate and a guide device (100) with guide members (101) extending at least on the inside of the limiting structures so that the guide members and base plate interact with one another so that movement of the base plate along the travel direction (V) generates movement of the guide members at substantially the same speed along the travel direction. The base plate is so heavy that its weight force is greater than the sum of all the motion-blocking forces acting on the base plate as the latter moves along the travel direction through the guide members.