| 发明名称 |
THIN-FILM PIEZO-RESONATOR AND ITS MANUFACTURING METHOD |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thin-film piezo-resonator which keeps a strong hollow structure and does not cause a property deterioration even when a lower electrode is worked and removed inside a cavity. <P>SOLUTION: A bottom face of the lower electrode 22 and the bottom face of a piezoelectric body film 23 constitute another plane in a lower electrode end portion 26. <P>COPYRIGHT: (C)2007,JPO&INPIT |
| 申请公布号 |
JP2006340256(A) |
申请公布日期 |
2006.12.14 |
| 申请号 |
JP20050165088 |
申请日期 |
2005.06.06 |
| 申请人 |
TOSHIBA CORP |
发明人 |
OHARA RYOICHI;YANASE NAOKO;SANO KENYA;YASUMOTO YASUAKI;ITAYA KAZUHIKO;KAWAKUBO TAKASHI |
| 分类号 |
H03H9/17;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/29;H01L41/316;H03H3/02 |
主分类号 |
H03H9/17 |
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