MANUFACTURING METHOD OF MICROLENS ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a microlens array by which gaps between microlenses are made minute. SOLUTION: A film consisting of a thermally deformable photosensitive material is formed with a uniform film thickness on a flat transparent film and then the film consisting of the photosensitive material is subjected to patterning to form a shape separating every forming region of the microlens. The photosensitive material subjected to patterning is heated to form a convex microlens and dry etching is applied to an arranging surface of the microlens to remove a flat part of a gap part between the microlenses. COPYRIGHT: (C)2007,JPO&INPIT