| 摘要 |
PROBLEM TO BE SOLVED: To provide a multi-stage cathode electrode mechanism capable of solving the problem of the cost that the size of the mechanism is increased and the cost of the device is increased because the size of a chamber part of a device body is increased, or two or more vacuum tanks are required. SOLUTION: Since two or more kinds of films are deposited in a cylindrical target unit, cylindrical targets are continuously arranged, and a cylindrical cathode electrode and an anode electrode are smoothed to generate plasma. The target unit, which is constituted for every unit heretofore, is simplified, thereby reducing device cost drastically. COPYRIGHT: (C)2007,JPO&INPIT
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