| 摘要 |
A method of manufacturing an image sensor comprises forming an isolation layer defining an active region in a semiconductor substrate using a first mask pattern formed on the semiconductor substrate, forming a first ion implantation mask pattern by reducing a width of the first mask pattern to expose an edge portion of the active region around the isolation layer, forming a first hole accumulation region by implanting a first conductive type of impurity ions into the edge portion of the active region using the first ion implantation mask pattern, forming a second ion implantation mask pattern covering the isolation layer and the first hole accumulation region, and forming a photodiode by implanting a second conductive type of impurity ions into a region of the semiconductor substrate using the second ion implantation mask pattern, wherein at least a portion of the region is surrounded by the first hole accumulation region in the active region.
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