| 摘要 |
<p>A sealing structure for sealing the gap between a vacuum container (2) and a lid (3), i.e. a member connected to the opening of the vacuum container (2) and closing the opening. A cavity (66) is formed in an elastomer O-ring (64) interposed between the vacuum container (2) and the lid (3). A cooling pipe (65) is disposed in the cavity (66). The O-ring (64) is cooled by feeding refrigerant through the cooling pipe (65). Since permeability of gas permeating through a solid varies depending on the temperature, permeation of gas, especially oxygen, through the O-ring (64) can be reduced by cooling the O-ring (64) and a high degree of vacuum can be maintained in the vacuum container (2). Since the O-ring (64) is cooled from the inside, only the O-ring (64) can be cooled locally, and the cooling of the O-ring (64) has no effect on the temperature control at other parts of the vacuum device.</p> |
