WAFER TRANSFER APPARATUS

摘要

A wafer transfer apparatus is provided to exactly sense a positioning state of a wafer by using a left and a right sensor. A wafer is positioned at a robot chuck(110). Vertical sensors(120a,120b) are installed at an upper portion and a lower portion of the robot chuck to be spaced apart from each other, and senses the wafer positioned at the robot chuck. Left and right sensors(140a,140b) are installed at the robot chuck parallel to each other. The left and right sensors judge whether or not the wafer is horizontally positioned at the robot chuck. Sensor guides(130) are installed at both sides of the robot chuck, and the left and right sensors are attached to the sensor guide.