发明名称 A POSITION CORRECTION METHOD FOR FLUX PROCESSOR AND BALL ATTACH PROCESS OF SEMICONDUCTOR ELEMENT
摘要 A position correcting method for flux process and ball attach process of a semiconductor device is provided to reduce remarkably the generation of product failure by correcting errors many times. Whether a material arrives at a flux process position or not is determined(S11). When the material arrives at the flux process position, a fluxing apparatus and the material are photographed by using a camera(S12). First position values of the photographed material and fluxing apparatus are calculated and whether a first predetermined error is generated or not is checked(S13,S14). When the first predetermined error exists, the position of the fluxing apparatus is corrected(S15). A fluxing process is performed on the material(S16). A plug dotted on the material is photographed(S17). A second position value of the plug is calculated and whether a second predetermined error exists or not is checked(S18,S19). When the second predetermined error exists, the position of the fluxing apparatus is corrected again(S20).
申请公布号 KR100660032(B1) 申请公布日期 2006.12.14
申请号 KR20060094811 申请日期 2006.09.28
申请人 KOREA SEMICINDUCTOR SYSTEM CO., LTD. 发明人 PARK, MYUNG SOON
分类号 H01L21/60;H01L21/02 主分类号 H01L21/60
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