SUBSTRATE SUCKING DEVICE, SUBSTRATE SUPPORTING BODY AND SUBSTRATE CARRIER DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate sucking device capable of following while sucking a substrate even when the substrate thermally expands/contracts. SOLUTION: This substrate sucking device has a pad seat 21 having a recessed part 21a provided on a central part, an air intake passage 21b communicated with outside from a bottom part center of the recessed part 21a and a ball storage recessed part 21c provided in the circumference of the recessed part, a pad supporting body 22 of an elastic body made of a large bore cylinder part 22a and a small bore cylinder part 22b continuously making contact with the large bore cylinder part 22a and a suction pad 23 of a hat shape made of a cylinder part 23a having a collar 23b and provided with a peripheral edge protruded part 23c in the upper part circumference and an air intake hole 23d in the center. A ball 24 is stored in the ball storage recessed part 21c, the pad supporting body 22 is erected on the air intake passage 21b of the pad seat 21, the suction pad 23 is placed on an upper surface of the large bore cylinder part 22a and a pad presser 25 to allow movement of the suction pad 23 in the vertical direction and in the horizontal direction is provided. COPYRIGHT: (C)2007,JPO&INPIT