| 摘要 |
PROBLEM TO BE SOLVED: To realize a simple method of computing/calibrating the movement quantity of a prober. SOLUTION: The prober is provided with a probe card having a needle, a wafer chuck holding a wafer with an electrode, a moving mechanism to move the wafer chuck, a needle position detecting means, a wafer alignment means to detect the position of the electrode, and a movement control unit which is provided with a movement quantity computer that computes the movement quantity of an electrode to be contacted with the needle on the basis of the position of the needle, the position of the electrode and the movement quantity computation corrected value. When the movement quantity computation corrected value is calibrated, the position of the needle is detected, the position of the electrode is detected, the electrode is brought into contact with the needle, the trace of the needle is processed by image so as to detect the position of the needle trace, an image of the needle and the needle trace mark showing the position of the needle trace are displayed by a display device, the position of the needle trace mark is corrected on the image by an operator, a positional deviation of the needle trace mark is calculated, and the movement quantity computation corrected value is corrected based on the calculated deviation. COPYRIGHT: (C)2007,JPO&INPIT
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