| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical measurement apparatus capable of shortening the measurement time by enhancing the utilization efficiency of light. SOLUTION: The optical measurement apparatus is provided with the light-scanning part 20 which is composed of the microlens array 23, the beam splitter 21, and the pin hole array 22. The parallel light, irradiating the microlens array 23, is converged by each microlens, after that it is made to pass through each corresponding pin hole P of the pin hole array 22, and irradiate the measurement object W, after converged by the objective lens 13. The specular reflection light from the measurement object W passes through the pin hole P via the objective lens 13, focuses on the focus surface 17A of the imaging means 17 via the focusing lens 16 after transmitting the beam splitter 21 without passing the microlens array 23. COPYRIGHT: (C)2007,JPO&INPIT
|
