发明名称 FLOATING CARRYING DEVICE FOR PLATE-LIKE MATERIAL AND FLAT BOTTOM-LIKE MATERIAL
摘要 PROBLEM TO BE SOLVED: To provide a noncontact floating transport device for reducing a loss in gas, by simplifying a structure of a carrying device. SOLUTION: By arranging a position of an inflow hole 10 for making the gas flow in a cylinder chamber 19 in an upper position of a central position of a spherical valve element 18 when closing the valve, inclined jetting of the gas in the carrying axis direction increases atmospheric pressure of clearance formed of an upper surface of a carrying base 1 and a flat bottom surface of flat panels 9, and acts so as to carry in the carrying axis direction by floating the flat panels 9 by generating an air current film. While, an air current turning in the cylinder chamber 19 direction by branching off in an edge part of a gas jetting hole 11 detains the spherical valve element 18 in a floating state in an intermediate part in the cylinder chamber 19 by applying wind pressure to the spherical valve element 18. Since a compressed gas flow flowing in the cylinder chamber 19 from an auxiliary hole 16 operates so as to relieve a turbulence state generated in a bottom part of the cylinder chamber 19, the spherical valve element 18 detained in the intermediate part of the cylinder chamber 19 is restrained from the violent vertical movement. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006335564(A) 申请公布日期 2006.12.14
申请号 JP20050187322 申请日期 2005.05.30
申请人 MATSUURA SEISAKUSHO:KK;MATSUURA KUNIKO;TAWARA KAORI 发明人 MATSUURA TADAAKI
分类号 B65G51/03;B65G49/06;B65G49/07;H01L21/677 主分类号 B65G51/03
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