发明名称 Cobalt electroless plating in microelectronic devices
摘要 An electroless plating method and composition for depositing Co or Co alloys onto a metal-based substrate in manufacture of microelectronic devices, involving a source of Co ions, a reducing agent for reducing the depositions ions to metal onto the substrate, and an oxime-based compound stabilizer.
申请公布号 US2006280860(A1) 申请公布日期 2006.12.14
申请号 US20050148724 申请日期 2005.06.09
申请人 ENTHONE INC. 发明人 PANECCASIO VINCENT JR.;CHEN QINGYUN;VALVERDE CHARLES;PETROV NICOLAI;WITT CHRISTIAN;HURTUBISE RICHARD
分类号 B05D5/12;C23C18/34;C23C18/36 主分类号 B05D5/12
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