发明名称 FOCUS POSITION CONTROL METHOD OF EXPOSING DEVICE, AND EXPOSING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To obtain a focus position control method of an exposing device, with which deviation of a focus position of a laser beam is reduced, and the exposing device. <P>SOLUTION: The deviation of the focus position of the laser beam, caused by a difference in light transmittance of photosensitive portions, is reduced by preliminarily setting a focus correction value based on the difference in light transmittance of the photosensitive portions of photosensitive materials, and transferring a Z stage as far as the focus correction value based on the focus correction value, and thereby accuracy of the focus positions of the light beams of respective exposing heads is improved. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006337610(A) 申请公布日期 2006.12.14
申请号 JP20050160695 申请日期 2005.05.31
申请人 FUJIFILM HOLDINGS CORP 发明人 KITAGAWA TOMOYA;SUMI KATSUTO;KOWADA KAZUTERU
分类号 G03F7/207;G02B27/18;H05K3/00 主分类号 G03F7/207
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