发明名称 |
MICRO STRUCTURE, CANTILEVER, SCANNING PROBE MICROSCOPE AND A METHOD OF MEASURING DEFORMATION QUANTITY FOR THE FINE STRUCTURE |
摘要 |
It is desired that highly efficient and highly sensitive sensors being extremely small size is provided in desired position, desired shape and size for a micro structure that causes the elastic deformation at least a part thereof. Moreover, it is also required that facilitating to assemble and adjust the components, miniaturizing and simplifying the detection circuit, and measuring a local displacement of a fine part of the micro structure. The disclosing micro structure is cantilever 1 which beam part 14 causes the elastic deformation. This cantilever 1 is provided with a sensor 12 detecting elastic deformation of beam part 14 by tunneling effect.
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申请公布号 |
US2006277981(A1) |
申请公布日期 |
2006.12.14 |
申请号 |
US20060422725 |
申请日期 |
2006.06.07 |
申请人 |
TDK CORPORATION |
发明人 |
OHTA NAOKI;KUWASHIMA TETSUYA |
分类号 |
G01B5/28;G01B7/34;G01B21/30;G01Q20/04;G01Q60/22;G01Q60/38;G01Q60/54;G01Q70/00 |
主分类号 |
G01B5/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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