发明名称 |
METHOD FOR MAKING ESTIMATION PATTERN AND COMPUTER PROGRAM PRODUCT |
摘要 |
An evaluation pattern forming method and a computer program product are provided to easily form rich pattern variations. Plural types of unit patterns are formed based on a seed pattern group and a unit frame. The seed pattern group includes plural types of seed patterns. Each of the seed patterns includes a pattern corresponding to the seed pattern arranged in the unit frame. Plural types of evaluation patterns are formed based on the plural types of unit patterns and an arrangement frame having a size of N times of the unit frame (N is a positive integer). Each of evaluation patterns has the evaluation unit patterns arranged in the arrangement frame. An inside of the arrangement frame is filled with the plural types of unit patterns. |
申请公布号 |
KR20060128688(A) |
申请公布日期 |
2006.12.14 |
申请号 |
KR20060051279 |
申请日期 |
2006.06.08 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
MAEDA SHIMON |
分类号 |
H01L21/66;G03F1/36;G03F1/68;G03F1/70;G06F9/44;G06F17/50;H01L21/027 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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