发明名称 METHOD FOR MAKING ESTIMATION PATTERN AND COMPUTER PROGRAM PRODUCT
摘要 An evaluation pattern forming method and a computer program product are provided to easily form rich pattern variations. Plural types of unit patterns are formed based on a seed pattern group and a unit frame. The seed pattern group includes plural types of seed patterns. Each of the seed patterns includes a pattern corresponding to the seed pattern arranged in the unit frame. Plural types of evaluation patterns are formed based on the plural types of unit patterns and an arrangement frame having a size of N times of the unit frame (N is a positive integer). Each of evaluation patterns has the evaluation unit patterns arranged in the arrangement frame. An inside of the arrangement frame is filled with the plural types of unit patterns.
申请公布号 KR20060128688(A) 申请公布日期 2006.12.14
申请号 KR20060051279 申请日期 2006.06.08
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MAEDA SHIMON
分类号 H01L21/66;G03F1/36;G03F1/68;G03F1/70;G06F9/44;G06F17/50;H01L21/027 主分类号 H01L21/66
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