| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a solar cell element having an antireflection film having improved characteristics capable of sufficiently exhibiting a passivation effect and maximally exhibiting the effect of antireflection, and a manufacturing method thereof. <P>SOLUTION: The solar cell element is configured so as to have the antireflection film 4 on one main surface side of a semiconductor substrate 1. The element has a density transition region 3 containing the main component of the semiconductor substrate 1 and the main component of the antireflection film 4, between the semiconductor substrate 1 and the antireflection film 4. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
