| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrapure water storage tank capable of preventing stagnation in the tank by preventing the interfusion of air bubbles without requiring high equipment costs. SOLUTION: A straightening vane 40 is disposed right in front of the pipe nozzle 20 of the ultrapure water storage tank 1 in order that the ultrapure water flowing in from the pipe nozzle 20 is caused to flow circumferentially and obliquely upward in a tank body 10. Thus, since a circumferential flow of water and a vertical flow of water can be generated in a ultrapure water layer 50, stagnation can be prevented. COPYRIGHT: (C)2007,JPO&INPIT
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