Dual gate isolating maintenance slit valve chamber with pumping option

摘要

In a coater for applying layers on large substrates, isolation between portions of the coater is provided by dual gate slit valve chambers. A dual gate slit valve has one gate on either side of a wall that has an opening. Gates are clear of the opening in the open position and cover the opening from both sides in the closed position. When one side of the dual gate slit valve chamber is at atmospheric pressure and the other is under vacuum, atmospheric pressure helps to keep the slit valve sealed by pushing one gate against the wall. This works regardless of which side of the valve is at atmosphere. One or more pumps may be mounted on the slit valve chamber.