| 摘要 |
Provided is a laser oscillator ( 2 ) including: a first electrode pair ( 7 a); a second electrode pair ( 7 b); a discharge power supply ( 4 ) that induces pulse discharge in the first and second electrode pairs ( 7 a, 7 b); and at least one of a discharge phase control unit ( 53 ) which extends control so that a first discharge phase (X 1 ) to be attained in the first electrode pair ( 7 a) and a second discharge phase (X 2 ) to be attained in the second electrode pair ( 7 b) will be different from each other during the pulse discharge induced by the discharge power supply ( 4 ), a duty cycle control unit ( 53 ) which extends control so that a first duty cycle (Y 1 ) to be attained in the first electrode pair ( 7 a) and a second duty cycle (Y 2 ) to be attained in the second electrode pair ( 7 b) will be different from each other during the pulse discharge, a pulse frequency control unit ( 53 ) which extends control so that a first pulse frequency (Z 1 ) to be attained in the first electrode pair ( 7 a) and a second pulse frequency (Z 2 ) to be attained in the second electrode pair ( 7 b) will be different from each other during the pulse discharge. Consequently, while discharges in the discharge electrodes are stabilized, laser output can be quickly controlled.
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