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发明名称
IMPEDANZMESSSCHALTUNG UND KAPAZITÄTSMESSSCHALTUNG
摘要
申请公布号
DE60215827(D1)
申请公布日期
2006.12.14
申请号
DE20026015827
申请日期
2002.09.06
申请人
TOKYO ELECTRON LTD.;HOKUTO ELECTRONICS INC.
发明人
YAKABE,M;IKEUCHI,N;MATSUMOTO,T;NAKANO
分类号
G01R27/26;G01D5/24;G01N27/22;H04R3/06
主分类号
G01R27/26
代理机构
代理人
主权项
地址
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