NON-CONTACT REVOLVING STAGE AND A METHOD FOR DETECTING THE SIX DEGREE-OF-FREEDOM POSITION THEREOF

摘要

A non-contact revolving stage is provided to perform the rotation of a rotor and minute perturbation toward a semi-diameter direction of a rotor, by stable floating of the rotor with only magnetic force between a stator and the rotor. In a non-contact revolving stage system, a longitudinal magnetic flux induction motor(120,121,122) comprises a plurality of electromagnets. The electromagnets are arranged along a circumference direction in an equivalent gap. A secondary part comprising a conductor(110) and a yoke(111) is arranged on the bottom of the induction motor. The secondary part is floated and rotated without contacting with the induction motor.