| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mark for positioning capable of reducing the space of a scribe lane and of utilizing the space of a substrate more efficiently. <P>SOLUTION: The mark for positioning to be used for the substrate consists of the periodic 2-dimensional array of a structure. The spacing of the structure is smaller than an alignment beam, but is larger than an exposure beam. <P>COPYRIGHT: (C)2007,JPO&INPIT |
