发明名称 PROCESSING MACHINE PROVIDED WITH CLEANER
摘要 PROBLEM TO BE SOLVED: To provide a processing machine provided with a cleaner capable of reducing a space in a state that cover members for shielding an opening are retreated, and also, capable of preventing cleaning water from falling off when the cover members are retreated. SOLUTION: The processing machine provided with the cleaner has a cleaning housing, a spinner table rotating while holding a workpiece, a cleaning water supply means for supplying the cleaning water to the workpiece, and a covering means 8 for openably/closably shielding the opening of the cleaning housing. It is also provided with a plurality of the cover members 82, 83 for shielding a shield area, which are composed so as to be mutually movable vertically separately between a retreat area and the shield area shielding the opening, and a cover member operating means 9 for moving a plurality of the cover members 82, 83 to the shield area, and also, for moving a plurality of the cover members 82, 83 to the retreat area. A plurality of the cover members 82, 83 are positioned so as to be mutually vertically overlapped when moved to the retreat area. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006339435(A) 申请公布日期 2006.12.14
申请号 JP20050162706 申请日期 2005.06.02
申请人 DISCO ABRASIVE SYST LTD 发明人 KUSUNOKI YOSHIHIRO
分类号 H01L21/301;H01L21/304 主分类号 H01L21/301
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