| 摘要 |
PROBLEM TO BE SOLVED: To efficiently form a partition wall of a display panel by combining the blast method and the etching method. SOLUTION: The method comprises a step of providing an etching film 2 having a prescribed thickness over the whole front surface of a panel 1, a step of providing a photosensitive film 3' having a prescribed thickness at an upper surface side at which the etching film 2 is provided and also forming a blasting masking film 3 to which a partition wall pattern is transferred by providing a master sheet 5 in which partition wall patterns 51 and 55 are formed at the upper surface side and exposing the photosensitive film 3', a step of forming a cavity 11 having a prescribed depth by applying a prescribed blasting process from the upper surface side of the blasting masking film 3, a step of etching the inside surface side of the cavity 11 by immersing a semi-fabricated product having the cavity 11 having a prescribed depth in a tank 44 in which a prescribed etching liquid 4 is filled and a step of removing the etching film 2 and the blasting masking film 3 and drying the whole of the panel 1. COPYRIGHT: (C)2007,JPO&INPIT
|
