Linear drive mechanism for clean-room applications has two pot-shaped casing parts pushed together like a telescope

摘要

Pot-shaped casing parts (PSCP) (2,3) push together like a telescope with openings facing each other and an axial overlap of their side-walls (2b,3b). In common with the PSCP, means of sealing effective between the two PSCP border a working chamber (16) affected by a fluid pressurized medium in a controlled manner via a control channel (17) so as to alter an axial relative position in the PSCP.