METHOD FOR PRODUCING F2-CONTAINING GAS, APPARATUS FOR PRODUCING F2-CONTAINING GAS, METHOD FOR MODIFYING ARTICLE SURFACE, AND APPARATUS FOR MODIFYING ARTICLE SURFACE

摘要

The present invention provides processes and equipments for safely and easily preparing an F 2 -containing gas, as well as processes and equipments for surface modification using the F 2 -containing gas prepared. According to the present invention, a gas containing a fluoro compound that is easier to handle than F 2 is supplied and the fluoro compound is excited and decomposed to convert it into F 2 gas before surface modification and then used for surface modification. According to the present invention, there is no necessity of providing, storing and transporting a large amount of F 2 gas in advance because a necessary amount of F 2 gas is obtained immediately before surface modification. A process for preparing an F 2 -containing gas comprises the steps of exciting at least one fluoro compound in a fluoro compound-containing gas by conferring energy on the fluoro compound-containing gas under reduced pressure; and partially or completely converting the excited fluoro compound-containing gas containing the excited fluoro compound into F 2 under normal pressure or overpressure.