| 摘要 |
A cleaning bath and a cleaning apparatus having the same are provided to prevent vortex of a cleaning liquid by employing a plurality of cleaning liquid spraying holes formed on a wall of an inner cleaning bath. Plural cleaning liquid spraying holes(196) are formed on a wall of an inner cleaning bath(126). An outer cleaning tub(128) is formed on an outer side of the inner cleaning bath to temporarily store the overflowed cleaning liquid. A cleaning liquid supply unit selectively supplies the cleaning liquid to the inner and outer cleaning baths. An overflow through the inner cleaning bath and a downflow through the outer cleaning bath are selectively performed to clean a substrate. The cleaning liquid supply unit includes a pump(136), a first pipe(134a) where a first valve(174a) is installed, a second pipe(134b), a third pipe(134c,), and a fourth pipe(134d) where a fourth valve(174d) is installed. The first pipe connects the outer cleaning bath to the pump. Ends of the second and the third pipes are connected to the front and the rear of the first valve. A second valve(174b) and a third valve(174c) are installed on the second and third pipes. The fourth pipe connects the pump to the inner cleaning bath.
|
