| 摘要 |
<p>An apparatus and a method for manufacturing a flat panel display device are provided to simplify the manufacturing process and to enhance the lifetime of a soft mold. In the thin film patterning process by means of a soft mold, a thin film(132a) is formed on a substrate(131) and thereafter, the etch resist solution is coated on the substrate. The etch resist layer is patterned by means of the soft mold. The thin film is patterned by etching. The remaining etch resist pattern is stripped and thereafter an inspection process is performed. The thin film formed on the substrate is formed on the substrate by means of the existing coating or deposition process with basic materials. The etch resist solution includes the main resin, activator, initiator, thermal flow derivatives and the like.</p> |
