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发明名称
Dielectric films from organhydridosiloxane resins
摘要
申请公布号
EP1641033(A3)
申请公布日期
2006.12.13
申请号
EP20050027397
申请日期
2000.01.07
申请人
ALLIEDSIGNAL, INC.
发明人
HACKER, NIGEL, P.;LEFFERTS, SCOTT;SLESSOR, MICHAEL, D.;FIGGE, LISA, K.
分类号
C08G77/12;H01L21/312;H01L21/316
主分类号
C08G77/12
代理机构
代理人
主权项
地址
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