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发明名称
摘要
申请公布号
JP3857653(B2)
申请公布日期
2006.12.13
申请号
JP20030024070
申请日期
2003.01.31
申请人
发明人
分类号
H01L21/673;H01L21/677;H01L21/68
主分类号
H01L21/673
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代理人
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地址
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