发明名称 |
High temperature evaporator cell and method of evaporating high-melting materials |
摘要 |
<p>A vaporization cell (100) comprises a crucible (10) for receiving the vaporization raw material and a heating device (10) with a heating resistance (21) for resistance heating of the crucible. The heating resistance (21) is provided as an electron emitter for electron-beam heating of the crucible (10). Independent claims are included for the following (a) a coating installation; and (b) a method for vaporization of high melting-point vaporization raw material.</p> |
申请公布号 |
EP1732129(A2) |
申请公布日期 |
2006.12.13 |
申请号 |
EP20060011125 |
申请日期 |
2006.05.30 |
申请人 |
CREATEC FISCHER & CO. GMBH;FORSCHUNGSVERBUND BERLIN E.V. |
发明人 |
BRAUN, WOLFGANG;FISCHER, ALBRECHT |
分类号 |
H01L23/34;C23C14/24;C23C14/30;C30B23/06 |
主分类号 |
H01L23/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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