System and method for measuring properties of a semiconductor substrate in a non-destructive way,申请号EP20030447186-传众专利搜索

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发明名称	System and method for measuring properties of a semiconductor substrate in a non-destructive way
摘要
申请公布号	EP1382958(B1)	申请公布日期	2006.12.13
申请号	EP20030447186	申请日期	2003.07.17
申请人	INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM VZW	发明人	CLARYSSE, TRUDO;VANDERVORST, WILFRIED
分类号	G01N21/17;G01N21/63;H01L21/66	主分类号	G01N21/17
代理机构		代理人
主权项
地址

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