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发明名称
摘要
申请公布号	JP3858000(B2)	申请公布日期	2006.12.13
申请号	JP20030131457	申请日期	2003.05.09
申请人		发明人
分类号	G01R31/28;G06F17/50;G01R31/3183;G06F19/00;G06Q50/00;H01L21/82;H01L21/822;H01L27/04	主分类号	G01R31/28
代理机构		代理人
主权项
地址

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