OPTICAL TYPE GAS DETECTOR

摘要

An optical type gas detector and a method of fabricating the same are provided to implement a gas cell by using a semiconductor quartz to form an optical reflective layer, thereby compacting structure of the gas detector. An optical type gas detector includes a light emitting part(11), a first silicon substrate(12), a semiconductor gas cell(13), a second silicon substrate(15), an optical filter part(14), and an optical detection part(16). The light emitting part emits a certain wavelength of light. The first silicon substrate has a first pass part in which the light emitting part is installed. The semiconductor gas cell has a space for passing the light, and an optical reflective layer for reflecting the light. The second silicon substrate has a second pass part. The optical filter part is installed between the second silicon substrate and the semiconductor gas cell to pass the certain wavelength of light only. The optical detection part detects light passed through the optical filter part.