发明名称 Method for making planar contacts to semiconductor components with decreased deformation, corresponding device and apparatus for making the same
摘要 <p>Method involves preparation of the semiconductor component substrate, applying of a contact material on the surface of the semiconductor component substrate, heating of the semiconductor component substrate including the contact material deposited on it, on the first temperature above the manufacturing ambient temperature of semiconductor component. The method then involves cooling of the contacting material deposited on the semiconductor component substrate on a second temperature whereby the second temperature lies below the manufacturing ambient temperature of the semiconductor component. Independent claims are also included for the following: (A) Semiconductor component; and (B) Device for connecting metal contact material on a surface of a semiconductor component substrate.</p>
申请公布号 EP1732138(A2) 申请公布日期 2006.12.13
申请号 EP20060011508 申请日期 2006.06.02
申请人 UNIVERSITAET KONSTANZ 发明人 HUSTER, FRANK
分类号 H01L31/18;H01L21/00;H01L31/0224 主分类号 H01L31/18
代理机构 代理人
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