| 摘要 |
Using a solid immersion lens (SIL) having a spherical lens surface with a radius of curvature R<SUB>L </SUB>from a material having a refractive index n<SUB>L</SUB>, an image of a sample is observed. A geometric aberration characteristic caused by the SIL is evaluated by using a predetermined optical system. Using a coefficient k (0<K<1) set to satisfy a condition where the average image surface becomes flat or a condition yielding a favorable chromatic aberration characteristic, the sample is observed with the solid immersion lens while a surface, orthogonal to the optical axis, including a point located downstream of the spherical center C of the lens surface 10 by kx(R<SUB>L</SUB>/n<SUB>L</SUB>) along the optical axis is employed as a sample observation surface 20 . This realizes a sample observation method that can observe the image of the sample favorably with a solid immersion lens, and the solid immersion lens.
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