| 摘要 |
A method for manufacturing a filament assembly of an ion implanter is provided to prevent the generation of voids between a filament and a lead tube by enclosing and pressurizing a peripheral portion of the lead tube. A filament composed of a plurality of metal wires twisted with each other and a cylinder type lead tube with a predetermined length are prepared(S10). Both end portions of the filament are inserted into the lead tube, respectively(S20). A peripheral portion of the lead tube is pressurized by using a predetermined pressurizing unit(S30). At this time, the predetermined pressurizing unit encloses the peripheral portion of the lead tube.
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