| 摘要 |
FIELD: optical instrument engineering; optical guidance systems. ^ SUBSTANCE: device has the following units disposed along path of laser beam: beam-splitting plate, focusing objective, object holder and device for inspecting focusing, namely telescope. The latter is placed at back stroke of beams. Unit for registering focal volume is mounted for movement in perpendicular to optical axis and along the optical axis. Unit has transparent test object, tightly fixed to manipulator, magnifying micro lens which provides high spatial resolution, and radiation intensity meter made of array photodetector and signal processing unit. Surfaces of test object and of detector are disposed in conjugated planes. ^ EFFECT: improved precision of focusing. ^ 3 cl, 1 dwg |
