SOFT X-RAY PROCESSING DEVICE AND SOFT X-RAY PROCESSING METHOD

摘要

An oval mirror for improving a condensing efficiency in conformity with the wavelength of a soft X-ray is used to increase the energy density of a soft X-ray, and a work such as an inorganic material is processed and/or modified with a precision of several nanometers by using a soft X-ray only without applying both patterned soft X-ray (patterning ray) and processing laser beam. A soft X- ray (14) emitted from a light source (7) is condensed onto an oval mirror (15) at a high energy density and is applied to a work (19) in a specified pattern, and the work (19) is processed in a specified pattern only at a portion irradiated with the soft X-ray (14).