MECHANISM FOR OPENING AND SHUTTING A COVER IN VACCUM TREATING CHAMBER, AND METHOD THEREFOR,申请号KR20060015256-传众专利搜索

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发明名称	MECHANISM FOR OPENING AND SHUTTING A COVER IN VACCUM TREATING CHAMBER, AND METHOD THEREFOR
摘要
申请公布号	KR100654789(B1)	申请公布日期	2006.12.08
申请号	KR20060015256	申请日期	2006.02.16
申请人		发明人
分类号	B65G49/07;B25J9/06;G02F1/13;H01L21/677;H01L21/68	主分类号	B65G49/07
代理机构		代理人
主权项
地址

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