FILM DEPOSITION METHOD, PIEZOELECTRIC FILM FORMED BY THE FILM DEPOSITION METHOD, PIEZOELECTRIC ELEMENT WITH THE PIEZOELECTRIC FILM, AND INK JET APPARATUS USING THE PIEZOELECTRIC ELEMENT

摘要

PROBLEM TO BE SOLVED: To easily deposit a film of a desired pattern without using a mask or the like in a film deposition method using an aerosol deposition method.

SOLUTION: Particles are jetted toward a base body surface to deposit a film made of a material constituting the particle. This film deposition method comprises: a process of preparing a substrate having a surface equipped with at least two regions different in material depositing rate; and a process of selectively depositing the film containing a film-forming material on the region of larger coarseness of the two regions by jetting many particles containing the film depositing material onto the surface.

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