| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve a problem of chromatic aberration caused in one optical system communizing each optical path, even if a wavelength is different between a machining laser beam that is emitted to a surface to be machined and an auxiliary beam that projects an image of the surface to be machined onto the image surface of a viewing means, and to perform stable laser beam machining for a long time. <P>SOLUTION: The apparatus is equipped with the first focusing means which adjusts a distance between an opening surface for emitting a laser beam and a surface to be machined so that machining is performed on the surface by the laser beam as desired, and the apparatus is also equipped with a second focusing means which adjusts a distance between the surface to be machined and the image surface so that an image of the surface to be machined is formed on the image surface, wherein the focal position of the laser beam and that of the auxiliary beam are each separately and independently adjusted. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
