| 摘要 |
PROBLEM TO BE SOLVED: To achieve a continuous crystal growth without optical interference with a small laser irradiation apparatus. SOLUTION: A megahertz laser beam is used, a divided laser beam is irradiated at a semiconductor film, and the semiconductor film is crystallized. In this case, an optical path difference is provided in the partitioning beam, and suppresses the optical interference. The optical path difference is set more than the length corresponding to the pulse width of the megahertz laser beam to less than the length corresponding to the pulse oscillation spacing, and the optical interference can be suppressed with very short optical path difference. Therefore, there is no kinetic energy deterioration of the laser and the laser beam can be irradiated efficiently and continuously. COPYRIGHT: (C)2007,JPO&INPIT
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