| 摘要 |
PROBLEM TO BE SOLVED: To easily and accurately measure any real gas other than nitrogen by using a pressure type flow rate controller calibrated based on nitrogen gas, and be easily replaced with a thermal type flow rate controller(mass flow controller). SOLUTION: This pressure flow rate controller for calculating the flow rate of fluid flowing through an orifice 8 using Qc=KP<SB>1</SB>(K is proportional constant) or Q<SB>c</SB>=KP<SB>2</SB><SP>m</SP>(P<SB>1</SB>-P<SB>2</SB>)<SP>n</SP>(K is proportional constant, m and n are constant) by using an orifice upstream side pressure P<SB>1</SB>and an orifice downstream pressure P<SB>2</SB>is configured to adjust a conversion rate(Qe'/Qer) as the rate of a set flow rate signal Qer and a set input signal Qe' of an input/output converter 25 and a conversion rate(Qo'/Qor') as the rate of the flow rate output signal Qor and the control flow rate output Qo'. COPYRIGHT: (C)2007,JPO&INPIT
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